New Fossa spiral vacuum pump from Busch
Busch has just launched a new spiral vacuum pump: the Fossa FO 0015 A. This is a hermetic, completely dry-compressing vacuum pump. This makes it perfectly suited to applications in analytics, such as electron microscopes, helium leak detectors and mass spectrometers. In the semiconductor industry, the Fossa is highly suited to the evacuation of load locks and transfer chambers. Other general industrial applications for the Fossa include the handling and transport of inert gases, plasma cleaning machines and coating machines. When used in conjunction with a turbo molecular vacuum pump, the new Fossa spiral vacuum pump provides a completely dry vacuum for use in high vacuum applications.
From a technical perspective, the new Fossa spiral vacuum pump from Busch has been constructed to ensure that no lubricated mechanical parts are located within the compression chamber. Thanks to the entirely hermetic nature of the Fossa spiral vacuum pump, contamination or chemical reactions with operating fluids are rendered impossible. An optional gas-ballast valve also allows the conveyance of vapours.
Lubricated for life bearings and the absence of shaft seals have helped to make the Fossa one of the most low-maintenance vacuum pumps available. The spiral tip seal can be replaced by the operator in just a few minutes, without the need for special tools.
The new Fossa spiral vacuum pump reaches a final pressure of < 2.5 x 10-2 mbar. The suction capacity of the pump is 15 m3/h, which contributes to short evacuation times. The pump is compact, which makes it easy to transport, and its low-vibration, quiet operation allows it to be set up and operated anywhere.
Suction capacity significantly expanded
Busch has significantly extended its series of dry-running Mink claw vacuum pumps. To achieve this, vacuum modules were designed that achieve suction capacity of up to 900 cubic metres per hour and more through the combination of several Mink claw vacuum pumps. These Mink MP vacuum modules were designed for operations which require high suction volumes, dry compression and high availability. Thanks to their modular construction, Mink vacuum systems can be excellently adapted to changing process conditions by altering the number or size of the Mink claw vacuum pumps in operation.
Mink claw vacuum modules work extremely economically thanks to their non-contact compression principle. Because the moving parts in the compression chamber do not come into contact with one another, the vacuum pump operates 100% wear-free. Operating fluids such as oil or water for cooling or lubrication are not needed in the compression chamber. For the operator, this means almost no maintenance and no replacement of wear parts, resulting in no costs for downtime, maintenance work or replacement parts. The costs for operating fluids are significantly reduced, as a gearbox oil change is only required every 20,000 operating hours, which - even in three-shift continuous operation - is only reached after more than two years.
Thanks to the non-contact and dry compression principle, a high level of efficiency can be achieved using significantly less energy than comparable suction volumes achieved by other mechanical vacuum pumps. It is possible to operate the pump using frequency-controlled motors, which further reduces energy costs. Mink claw vacuum pumps are IE2 motors.
The extension of the Mink series now facilitates suction volumes of 60 to 900 cubic metres per hour (50 Hz) or up to 1,080 cubic metres per hour (60 Hz) as standard. Even higher suction volumes can be achieved on request through the parallel connection of further vacuum modules.